Page 72 - Praxair - Specialty Gases and Equipment Solutions

PH 3
Phosphine

Transportation (M)SDS Reference
Information P-4643
UN Number: 2199 CAS Number
United States of America Canada Mexico
Shipping Name Phosphine Phosphine Phosphine 7803 - 51 - 2
Hazard Class 2.3 (2.1) 2.3 (2.1) 2.3 General Description
Label Toxic Gas, Toxic Gas, Toxic Gas, Colorless, highly toxic, flammable gas
Flammable Gas Flammable Gas Flammable Gas with a disagreeable, garlic-like odor.

Product/Grade Purity Part Cylinder H 2 O N 2 O 2 + C2 - CO 2 CO CH 4 AsH 3
Number Ar C5
(1)
Semiconductor, 99.9999% PH 6.0SP K 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1
6.0
Semiconductor, 99.9997% PH 5.7SP K, 1 1 0.5 0.1 0.1 0.1 0.1 0.1
5.7 UpTime ®
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.
Note: Phosphine is available in mixtures with balance gases of Argon, Helium, Hydrogen and Nitrogen.
Please contact your Praxair representative to discuss your mixture requirements.
Defined as Ethane (C 2 H 6 ), Propane (C 3 H 8 ) , Butane (C 4 H 10 ) and Pentane (C 5 H 12 ).
(1)

Cylinders

Cylinder Style Size Connection Pressure Volume Gross Weight Section B – Pure Gases
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 350/632 593 (41) 27 (12.25) 160 (73)
UpTime Sub-Atmospheric See page D •146 for all sub-atmospheric ion implant packaging.

Equipment Recommendations

i

See Section D for additional information
on Praxair’s Semiconductor product
line (pages D•143 - D•148).
See our complete line of gas delivery
systems in Section E, including gas
cabinets, process panels, and
controllers (pages E•304 - E•309).
UltraPurge 400 Gas Cabinet Series
™
(see page E •306)

1-877-PRAXAIR www.praxairdirect.com B•71