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SiCI            4
                                              Silicon Tetrachloride





            Transportation                                                      (M)SDS Reference
            Information                                                         P-4824
            UN Number: 1818                                                     CAS Number
                                  United States of America  Canada  Mexico
            Shipping Name        Silicon        Silicon       Silicon           10026 - 04 - 7
                                 Tetrachloride  Tetrachloride  Tetrachloride    General Description
            Hazard Class         8              8             8                 Colorless, highly toxic, nonflammable
            Label                Corrosive      Corrosive     Corrosive         liquid with a pungent odor.




              Product/      Purity   Part      Cylinder
              Grade                 Number
              Semiconductor,     99.99%   ST 4.0SP   ST55,
              4.0                              ST10

              HCI    TCS     Other         Carbon   Boron   P      As     Al     Resistivity  Other
                             Chlorosilanes                                                   Metals  (1)
              15     10      0.02          0.05     0.2     1.0    0.05   0.05   1000        5
              ppm/wt  ppm/wt  %wt          ppm/a    ppb/a   ppb/a  ppb/a  ppb/a  ohm-cm      ppb/wt




              Product/      Purity  Part       Cylinder  HCl     TCS      Al     Fe      Other
              Grade                 Number                                               Metals  (2)
              Fiber Optic, 4.0    99.99%   ST 4.0FO   ST55,    15   10    25     50      100
                                               ST10      ppm/wt  ppm/wt   ppb/wt  ppb/wt  ppb/wt                    Section B – Pure Gases



              Product/     Purity   Part     Cylinder    Boron   Carbon   Donor    Other         Resistivity
              Grade                 Number                                (P & As)   Chlorosilanes
              Semiconductor,    99.98%   ST 3.8SP   ST55, ST10,   1   1   2        0.06% wt      > 100 ohm-cm
              3.8                            SB          ppb/a   ppm/a    ppb/a


              Concentrations given are ppm by volume unless otherwise specified.
              Maximum ppm unless otherwise noted.
              Available with hydrogen or nitrogen pressure pads upon request.
              (1)   Other metals defined as Al, Fe, Ni, Cu, Cr, Mg, Mn, Zn, Ti, < 5 ppb/w each.
              (2)   Other metals defined as Ni, Cu, Cr, Mg < 100 ppb/w each.



              Cylinders

              Cylinder   Style           Size                 Connection   Pressure    Volume   Gross Weight
              Type                       in (cm)              CGA/DISS     psig (bar)   lb (kg)   lb (kg)
              ST55      Low Pressure Drum   46 x 24 (116.84 x 60.96)   Based on   0   600 (272)   850 (385)
                                                              application
              ST10      Low Pressure Drum   30 x 12 (76.2 x 30.48)   Based on   0     100 (45)   150 (68)
                                                              application
              SB        Low Pressure Drum   44 x 9 (111.7 x 22.8)   Based on   0      110 (50)   142 (65)
                                                              application


            i
            Contact your Praxair representative about equipment
            recommendations for Silicon Tetrachloride.

            1-877-PRAXAIR                     www.praxairdirect.com                                        B•75
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