Page 77 - Praxair - Specialty Gases and Equipment Solutions
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SiF          4
            Silicon Tetrafluoride





            Transportation                                                      (M)SDS Reference
            Information                                                         P-4652
            UN Number: 1859                                                     CAS Number
                                  United States of America  Canada  Mexico
            Shipping Name        Silicon        Silicon       Silicon           7783 - 61 - 1
                                 Tetrafluoride   Tetrafluoride   Tetrafluoride  General Description
            Hazard Class         2.3 (8)        2.3 (8)       2.3 (8)           Colorless, nonflammable, corrosive and
            Label                Toxic Gas,     Toxic Gas,    Toxic Gas,        toxic gas with a pungent odor similar to
                                 Corrosive      Corrosive     Corrosive         that of hydrochloric acid.



              Product/     Purity   Part     Cylinder   Ar + O 2  N 2  CO 2    CO    CH 4   As  B  P  Acidity
              Grade                 Number                                                            (HF)
              Semiconductor,    99.99%   SF 4.0SP   K, G,   1    3    1    1    10    0.5    0.5   0.5    50
              4.0                            UpTime ®
              Concentrations given are ppm by volume unless otherwise specified.
              Maximum ppm unless otherwise noted.




              Cylinders
              Cylinder   Style           Size               Connection   Pressure    Volume    Gross Weight
              Type                       in (cm)            CGA/DISS    psig (bar)   lb (kg)   lb (kg)
              K         High Pressure Steel   51 x 9 (129.5 x 22.9)   330/642   900 (61.2)   50 (22.7)   183 (83)
              G         High Pressure Steel   20 x 6 (50.8 x 15.2)   330/642   900 (61.2)   8 (3.6)   37 (16)
              UpTime    Sub-Atmospheric   See page D •146 for all sub-atmospheric ion implant packaging.




              Equipment Recommendations

     Section B – Pure Gases


                                                                                i

                                                                                See Section D for additional information
                                                                                on Praxair’s Semiconductor product
                                                                                line (pages D•143 - D•148).

                                                                                Contact your nearest Praxair location
                                                                                or call 1-877-PRAXAIR for technical
                                                                                information and assistance.



            SurePurge  1500 –
                   ™
            Two Cylinder Cabinet
            (see page E •306)










            B•76                              1-877-PRAXAIR                     www.praxairdirect.com
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