Page 77 - Praxair - Specialty Gases and Equipment Solutions

SiF 4
Silicon Tetrafluoride

Transportation (M)SDS Reference
Information P-4652
UN Number: 1859 CAS Number
United States of America Canada Mexico
Shipping Name Silicon Silicon Silicon 7783 - 61 - 1
Tetrafluoride Tetrafluoride Tetrafluoride General Description
Hazard Class 2.3 (8) 2.3 (8) 2.3 (8) Colorless, nonflammable, corrosive and
Label Toxic Gas, Toxic Gas, Toxic Gas, toxic gas with a pungent odor similar to
Corrosive Corrosive Corrosive that of hydrochloric acid.

Product/ Purity Part Cylinder Ar + O 2 N 2 CO 2 CO CH 4 As B P Acidity
Grade Number (HF)
Semiconductor, 99.99% SF 4.0SP K, G, 1 3 1 1 10 0.5 0.5 0.5 50
4.0 UpTime ®
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders
Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 330/642 900 (61.2) 50 (22.7) 183 (83)
G High Pressure Steel 20 x 6 (50.8 x 15.2) 330/642 900 (61.2) 8 (3.6) 37 (16)
UpTime Sub-Atmospheric See page D •146 for all sub-atmospheric ion implant packaging.

Equipment Recommendations

Section B – Pure Gases

i

See Section D for additional information
on Praxair’s Semiconductor product
line (pages D•143 - D•148).

Contact your nearest Praxair location
or call 1-877-PRAXAIR for technical
information and assistance.

SurePurge 1500 –
™
Two Cylinder Cabinet
(see page E •306)

B•76 1-877-PRAXAIR www.praxairdirect.com