Page 69 - Praxair - Specialty Gases and Equipment Solutions

NF 3
Nitrogen Trifluoride

Transportation (M)SDS Reference
Information P-4854
UN Number: 2451 CAS Number
United States of America Canada Mexico
Shipping Name Nitrogen Nitrogen Nitrogen 7783 - 54 - 2
Trifluoride Trifluoride Trifluoride General Description
Hazard Class 2.2 (5.1) 2.2 (5.1) 2.2 Colorless, odorless, nonflammable,
Label Nonflammable Nonflammable Nonflammable corrosive, toxic gas.
Gas, Oxidizer Gas, Oxidizer Gas, Oxidizer

Product/Grade Purity Part Cylinder O 2 H 2 O N 2 CO 2 N 2 O CF 4 SF 6 CO CH 4 Acidity
Number
Semiconductor, 4.0 99.99% NF 4.0SP K 5 1 5 3 3 40 5 1 1 1
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders

Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 330/640 1450 (145) 44 (20) 179 (81)

Equipment Recommendations

i

See Section D for additional information
Section B – Pure Gases
on Praxair’s Semiconductor product
line (pages D•143 - D•148).
See our complete line of gas delivery
systems in Section E, including
gas cabinets, process panels, and
controllers.

UltraPurge 400 Gas Cabinet Series
™
(see page E •306)

B•68 1-877-PRAXAIR www.praxairdirect.com