Page 45 - Praxair - Specialty Gases and Equipment Solutions

Enriched Germanium

Tetrafluoride Ge F 4
72

Transportation MSDS Reference
Information P-19-6362-E
UN Number: 3308 CAS Number
United States of America Canada Mexico
Shipping Name Liquefied Gas, Liquefied Gas, Liquefied Gas, 848094 - 33 - 7
Toxic, Corrosive, Toxic, Corrosive, Toxic, Corrosive, General Description
N.O.S. N.O.S. N.O.S. A colorless, toxic, corrosive gas.
Germanium Germanium Germanium
Tetrafluoride Tetrafluoride Tetrafluoride
Hazard Class 2.3 (8) 2.3 (8) 2.3 (8)
Label Toxic Gas, Toxic Gas, Toxic Gas,
Corrosive Corrosive Corrosive

Product/Grade Purity Part Cylinder Ge 72 Isotopic N 2 Ar + O 2 CO 2 CO SO 2
Number Enrichment
Semiconductor, 4.0 99.99% GT 4.0EN G, LB, 50-52% Atomic 25 50 25 25 25
UpTime ®
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders

Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) gr (kg) lb (kg)
G High Pressure Steel 20 X 6 (50.8 x 15.2) 330/642 205 (14.1) 8000 (8) 47 (21)
LB High Pressure Steel 16 x 2 (40.6 x 5.1) 330/642 205 (14.1) 400 (0.4) 8 (4)
UpTime Sub-Atmospheric See page D •146 for all sub-atmospheric ion implant packaging.

Section B – Pure Gases
Equipment Recommendations

UltraPurge 400 Gas Cabinet Series
™
(see page E •306)

B•44 1-877-PRAXAIR www.praxairdirect.com