Page 40 - Praxair - Specialty Gases and Equipment Solutions

SiH CI 2
Dichlorosilane
2

Transportation (M)SDS Reference
Information P-4587
UN Number: 2189 CAS Number
United States of America Canada Mexico
Shipping Name Dichlorosilane Dichlorosilane Dichlorosilane 4109 - 96 - 0
Hazard Class 2.3 (2.1) (8) 2.3 (2.1) (8) 2.3 (2.1) (8) General Description
Label Toxic Gas, Toxic Gas, Toxic Gas, Colorless, highly toxic, corrosive,
Flammable Gas, Flammable Gas, Flammable Gas, flammable, liquefied gas with a sharp,
Corrosive Corrosive Corrosive hydrochloric acid odor.

Product/Grade Purity Part Number Cylinder
Semiconductor 3.5 99.95% DI 3.5SP K
Semiconductor 3.0 99.9% DI 3.0SP K

Atmospheric Components Chemical Components

Product/Grade N 2 O 2 + Ar CO CO 2 CH 4 C 2 , C 3 , C 4 MCS TCS STC HCI
ppm/v ppm/v ppm/v ppm/v ppm/v ppm/v ppm/w ppm/w ppm/w ppm/w
Semiconductor 3.5 1 1 1 1 1 1 250 200 10 150
Semiconductor 3.0 1 1 – – – – 250 500 200 –
MCS = Monochlorosilane
TCS = Trichlorosilane
STC = Silicon Tetrachloride

Epi Film Components Section B – Pure Gases
Product/Grade Al B P As Ga In Sb C O 2 Resistivity
ppb/a ppb/a ppb/a ppb/a ppb/a ppb/a ppb/a ppm/a ppm/a ohm-cm
Semiconductor 3.5 0.04 0.05 0.045 0.01 0.01 0.01 0.01 0.1 0.2 > 500
Semiconductor 3.0 0.04 0.05 0.045 0.01 – – – 0.1 – > 400

Metal Components
Product/Grade Fe Ni Cr Na Mo Mn Cu Zn
ppb/w ppb/w ppb/w ppb/w ppb/w ppb/w ppb/w ppb/w
Semiconductor 3.5 1 0.2 0.2 0.2 0.2 0.2 0.2 0.2
Semiconductor 3.0 3 – – – – – – –

Cylinders

Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 678/636 9 (.62) 90 (40.9) 210 (95.45)

i
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about equipment recommendations
for Dichlorosilane.

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