Page 47 - Praxair - Specialty Gases and Equipment Solutions

Halocarbon-23

(Trifluoromethane) CHF 3

Transportation M(SDS) Reference
Information P-4668
UN Number: 1984 CAS Number
United States of America Canada Mexico
Shipping Name Trifluoromethane Trifluoromethane Trifluoromethane 75 - 46 - 7
Hazard Class 2.2 2.2 2.2 General Description
Label Nonflammable Nonflammable Nonflammable Colorless, nonflammable, liquefied gas
Gas Gas Gas with a slight ethereal odor.

Product/ Purity Part Cylinder N 2 O 2 CO 2 H 2 O Other Acidity
Grade Number Halocarbons
Semiconductor, 99.999% HA 235.0SP K, G 6 2 2 1 1 1
5.0 ppm/wt
Semiconductor, 99.99% HA 234.0SP K, G 60 20 20 10 10 1
4.0 ppm/wt
Semiconductor, 99.0% HA 232.0SP K, G 5000 (Air) – 10 1000 1
2.0 ppm/wt
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders

Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 660/716 635 (43.78) 70 (31.8) 205 (93)
G High Pressure Steel 20 x 6 (50.8 x 15.2) 660/716 635 (43.78) 12 (5.4) 41 (18.6)

Section B – Pure Gases
Equipment Recommendations
Semiconductor, 5.0 Valve panels
Semiconductor, 4.0 Valve panels
Semiconductor, 2.0 7000 and 4000 series regulators

i

See Section D for additional information
on Praxair’s Semiconductor product
line (pages D•143 - D•148).
Praxair, your source for
technical support.
WP5M Manual Process Panel
for Hazardous Gas Service
(see page E •307)

B•46 1-877-PRAXAIR www.praxairdirect.com