Page 44 - Praxair - Specialty Gases and Equipment Solutions

Germanium

Tetrafluoride GeF
4

Transportation (M)SDS Reference
Information P-4822
UN Number: 3308 CAS Number
United States of America Canada Mexico
Shipping Name Liquefied Gas, Liquefied Gas, Liquefied Gas, 7783 - 58 - 6
Toxic, Corrosive, Toxic, Corrosive, Toxic, Corrosive, General Description
N.O.S. N.O.S. N.O.S. A colorless, toxic, corrosive gas.
Germanium Germanium Germanium
Tetrafluoride Tetrafluoride Tetrafluoride
Hazard Class 2.3 (8) 2.3 (8) 2.3 (8)
Label Toxic Gas, Toxic Gas, Toxic Gas,
Corrosive Corrosive Corrosive

Product/Grade Purity Part Cylinder N 2 Ar + O 2 CO 2 CO CF 4 HF SO 2
Number
Semiconductor, 4.0 99.99% GT 4.0 G, ELB 10 20 5 10 10 35 10
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders
Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) gr (kg) lb (kg)
G High Pressure Steel 20 X 6 (50.8 x 15.2) 330/642 205 (14.1) 8000 (8) 47 (21) Section B – Pure Gases
ELB High Pressure Steel 16 x 2 (40.6 x 5.1) 330/642 205 (14.1) 400 (0.4) 8 (4)

Equipment Recommendations

UltraPurge 400 Gas Cabinet Series
™
(see page E •306)

1-877-PRAXAIR www.praxairdirect.com B•43