Page 30 - Praxair - Specialty Gases and Equipment Solutions

BF 3
Boron Trifluoride

Transportation (M)SDS Reference
Information P-4567
UN Number: 1008 CAS Number
United States of America Canada Mexico
Shipping Name Boron Boron Boron 7637 - 07 - 2
Trifluoride Trifluoride Trifluoride General Description
Hazard Class 2.3 (8) 2.3 (8) 2.3 (8) Colorless, toxic, corrosive, nonflammable
Label Toxic Gas, Toxic Gas, Toxic Gas, gas with a pungent odor.
Corrosive Corrosive Corrosive

Product/Grade Purity Part Number Cylinder Air SO 2 SiF 4
Semiconductor, 2.5 99.5% BF 2.5SP L4, ELB 4000 ppm/w 20 ppm/w 300 ppm/w
Maximum ppm unless otherwise noted.

Cylinders
Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) grams lb (kg)
L4 High Pressure Steel 14 x 4.2 (35.5 x 10.6) 330/642 675 (46.5) 400 11 (5)
ELB High Pressure Steel 16 x 2 (40.6 x 5) 330/642 700 (48.3) 80 6 (3)

Equipment Recommendations Section B – Pure Gases

i

See Section D for additional information
on Praxair’s Semiconductor product
line (pages D•143 - D•148).
See our complete line of gas delivery
systems in Section E, including
gas cabinets, process panels, and
controllers.
SurePurge 1500 –
™
Two Cylinder Cabinet
(see page E •306)

1-877-PRAXAIR www.praxairdirect.com B•29