Page 28 - Praxair - Specialty Gases and Equipment Solutions

BCI 3
Boron Trichloride

Transportation (M)SDS Reference
Information P-4566
UN Number: 1741 CAS Number
United States of America Canada Mexico
Shipping Name Boron Boron Boron 10294 - 34 - 5
Trichloride Trichloride Trichloride General Description
Hazard Class 2.3 (8) 2.3 (8) 2.3 Colorless, toxic, corrosive, nonflammable,
Label Toxic Gas, Toxic Gas, Toxic Gas, liquefied gas with a pungent choking odor.
Corrosive Corrosive Corrosive

Product/ Purity Part Cylinder O 2 CO N 2 CH 4 CO 2 Silicon COCl 2 Cl 2 HCL
Grade Number (phosgene)
Semiconductor, 99.999% BC 5.0SP K, G 3 0.5 10 0.2 0.2 1 1 1 5
5.0 ppm/w
Semiconductor, 99.96% BC 3.6SP K, G – – – – – 10 300 100 –
3.6 ppm/w
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders
Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 660/634 4.4 (0.30) 100 (45.36) 223 (101) Section B – Pure Gases
G High Pressure Steel 20 x 6 (50.8 x 15.2) 660/634 4.4 (0.30) 14 (6.35) 43 (20)

i
Equipment Recommendations
Semiconductor, 5.0 Gas cabinets See Section D for additional information
Semiconductor, 3.6 Gas cabinets on Praxair’s Semiconductor product
line (pages D•143 - D•148).
See our complete line of gas delivery
systems in Section E, including
gas cabinets, process panels, and
controllers.
UltraPurge 400 Gas Cabinet Series
™
(see page E •306)

1-877-PRAXAIR www.praxairdirect.com B•27