Ultra-High Purity Regulators
Single Stage Electropolished 316L Stainless Steel Bar-stock Body – Two, Three and Four Port Configurations VCR Connections
The 7002 and 7003 Series regulators are intended for secondary pressure control of the highest Purity Gases or as point of use
pressure control in semiconductor process gas distribution systems. The 7004 Series regulators are intended for primary pressure control of semiconductor process gases as well as applications requiring constant delivery pressure control, regardless
of supply pressure variations.
Typical Application
- Semiconductor process gases N Gas and liquid chromatography
- Ultra high purity carrier gases
- Zero, span, and calibration gases
Specifications
- Operating Pressure Vacuum to 500 psig (241 bar)
- Temperature Range: -40 °F to 140 °F (-40 °C to 60 °C)
- Ports: 1/4” VCR
- Helium Leak Integrity: 1 × 10-9 scc/sec
- Cv: 0.06
Materials
- Body: 316L stainless steel
- Bonnet: Chrome-plated brass barstock
- Nozzle: 316L stainless steel
- Spring: Elgiloy®
- Seat: KEL-F® 81
- Poppet: Stainless steel
Features and Benefits of the 702, 703, and 704 Series Regulators
- Butt-welded VCR connections
- Highest leak integrity available
- 316 stainless steel bar-stock body
- Enhanced corrosion resistance
- Front and rear panel mountable
- Versatile system configuration
- Pressure ranges 0-15 to 0-500 psig
- Broad range of applications
- 3000 psig inlet pressure rating
- Safe use with high pressure cylinders
- Metal-to-metal diaphragm seal
- Reduces possibility of gas contamination
- 316L stainless steel diaphragm
- No inboard diffusion
- Orientable captured vent capable
- Safe and easy installation
- Field adjustable pressure limit
- Safeguard downstream equipment
Ordering Information
| Part No. | Outlet Pressure | Outlet Gauge | Inlet Gauge | Port Configuration | Assembly / Gauges |
|---|---|---|---|---|---|
| Series 7002 | 1: 0-15 psig 2: 0-50 psig 3: 0-100 psig | 0: None | 0: None | 0: 1/4" Tube Stub 1: FVCR x MVCR 2: MVCR x MVCR 3: MVCR x FVCR 4: FVCR x FVCR 5: IFS x IFS (IFS = Internal Face Seal) | 0: Bare Body 1: Standard Assembly |
| Series 7003 | 1: 0-15 psig 2: 0-50 psig 3: 0-100 psig | 30" -0-30 psig 30" -0-100 psig 30" -0-200 psig | 0: None | 0: 1/4" Tube Stub 1: FVCR x MVCR 2: MVCR x MVCR 3: MVCR x FVCR 4: FVCR x FVCR 5: IFS x IFS | 0: Bare Body (Welded Gauge Ports) 1: Standard Assembly (Welded Gauge Ports) 2: Bare Body (IFS Gauge Ports) 3: Standard Assembly (IFS Gauge Ports) |
| Series 7004 | 1: 0-15 psig 2: 0-50 psig 3: 0-100 psig | 30" -0-30 psig 30" -0-100 psig 30" -0-200 psig | 0: None 3: 0-4000 psig 6: 0-1000 psig | 0: 1/4" Tube Stub 1: FVCR x MVCR 2: MVCR x MVCR 3: MVCR x FVCR | 0: Bare Body (Welded Gauge Ports) 1: Standard Assembly (Welded Gauge Ports) 2: Bare Body (IFS Gauge Ports) 3: Standard Assembly (IFS Gauge Ports) |
Other outlet pressure ranges available upon request.